Hf-Based High-k Dielectrics: Process Development, Performance Characterization, and Reliability

Young-Hee Kim, Jack C. Lee

Anthology ID:

DBLP:series/synthesis/2006Kim

Volume:

2006

Year:

2006

Venue:

synthesis_series

Publisher:

Morgan & Claypool Publishers

URL:

https://doi.org/10.2200/S00005ED1V01Y200508SSM001

DOI:

10.2200/S00005ED1V01Y200508SSM001

DBLP:

series/synthesis/2006Kim

BibTeX:

Download Copy BibTeX to Clipboard Copy Bibkey "kim-2006-hfbased" to Clipboard

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