Development of Autonomous Failure Maintenance System for Semiconductor Manufacturing.

@inproceedings{han-2025-development, author = {Nuri Han and Jiwon Seo and Jonghee Ha and Jihyung Oh and Jinwoo Lee and Boram Jeong and Jongbin Park and Gilhwan Kim and Yohwan Joo}, editor = {Meeyoung Cha and Carl Yang and Senjuti Basu Roy and Chanyoung Park and Zhenhui Jessie Li and Noseong Park and Carl Yang and Senjuti Basu Roy and Zhenhui Jessie Li and Jaap Kamps and Kijung Shin and Bryan Hooi and Lifang He}, title = {{Development of Autonomous Failure Maintenance System for Semiconductor Manufacturing}}, booktitle = {{Proceedings of the 34th ACM International Conference on Information and Knowledge Management, CIKM 2025, Seoul, Republic of Korea, November 10-14, 2025}}, pages = {5723--5730}, publisher = {ACM}, year = {2025}, url = {https://doi.org/10.1145/3746252.3761556}, doi = {https://doi.org/10.1145/3746252.3761556} }